US Patent Issued to SEMES on Oct. 28 for "Apparatus for cleaning a back side of a substrate and method of cleaning a back side of a substrate" (South Korean Inventors)

ALEXANDRIA, Va., Oct. 28 -- United States Patent no. 12,453,989, issued on Oct. 28, was assigned to SEMES Co. LTD. (Chungcheongnam-do, South Korea).

"Apparatus for cleaning a back side of a substrate and method of cleaning a back side of a substrate" was invented by Sunghun Eom (Cheonan-si, South Korea), Kangsul Kim (Cheonan-si, South Korea), Youngjun Son (Cheonan-si, South Korea) and Seongyeol Choi (Cheonan-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "An apparatus for cleaning a back side of a substrate may include a cleaning assembly which may include a cleaning solution supply part receiving a cleaning solution and an ultrasonic wave supply part applying an ultrasonic wave to the cleanin...