ALEXANDRIA, Va., Oct. 28 -- United States Patent no. 12,451,372, issued on Oct. 21, was assigned to Semes Co. LTD. (Chungcheongnam-do, South Korea).
"Filler member and substrate treating apparatus" was invented by Ju Yeon Song (Sokcho-si, South Korea) and Sang Min Lee (Seoul, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "Disclosed is a substrate treating apparatus including: a chamber providing a treatment space therein; a substrate support member located inside the chamber and for supporting a substrate; a supply port for supplying a treatment fluid into the treatment space of the chamber; a filler member located between the supply port and the substrate to fill a portion of a volume of the tre...