ALEXANDRIA, Va., Oct. 28 -- United States Patent no. 12,449,401, issued on Oct. 21, was assigned to Semes Co. Ltd. (Chungcheongnam-do, South Korea).
"Apparatus and method for inspecting electrostatic chuck for substrate processing" was invented by Mi Young Jo (Hwaseong-si, South Korea), Choong Moo Shim (Hwaseong-si, South Korea) and Young Ran Ko (Daegu, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "The apparatus for inspecting the electrostatic chuck for substrate processing includes the electrostatic chuck including a ceramic layer and an electrode layer coupled to an inside of the ceramic layer, an ultrasonic sensor unit disposed on the electrostatic chuck, allowing an ultrasonic wave to be in...