US Patent Issued to SEMES on Oct. 14 for "Substrate inspecting apparatus and operating method thereof" (South Korean Inventor)

ALEXANDRIA, Va., Oct. 21 -- United States Patent no. 12,442,774, issued on Oct. 14, was assigned to SEMES Co. LTD. (Cheonan-si, South Korea).

"Substrate inspecting apparatus and operating method thereof" was invented by Yong Jun Lee (Cheonan-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "Proposed is a substrate inspecting apparatus and an operating method of the substrate inspecting apparatus capable of detecting and correcting angle of incidence (AOI) distortion occurring during an optical-based substrate inspection process. The substrate inspecting apparatus includes a light source generating incident light, an illumination optical system forming an optical path of the incident light, an im...