US Patent Issued to SEMES on Oct. 14 for "Robotic arm and apparatus for treating substrate including the same" (South Korean Inventor)

ALEXANDRIA, Va., Oct. 21 -- United States Patent no. 12,444,642, issued on Oct. 14, was assigned to SEMES Co. LTD. (Chungcheongnam-do, South Korea).

"Robotic arm and apparatus for treating substrate including the same" was invented by Tae Hoon Lee (Chungcheongnam-do, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "Provided is a robotic arm includes an arm body; and a plurality of pads connected to the arm body and in contact with a substrate, wherein the arm body includes a ceramic plate and an antistatic coating layer disposed on an external surface of the ceramic plate, wherein the pad includes a first conductive layer, and wherein a conductive portion connecting the pad to the antistatic coatin...