US Patent Issued to SEMES on Oct. 14 for "Chemical liquid supply unit, substrate processing apparatus having the same, and chemical liquid supply method" (South Korean Inventors)

ALEXANDRIA, Va., Oct. 21 -- United States Patent no. 12,440,861, issued on Oct. 14, was assigned to SEMES Co. LTD. (Cheonan-si, South Korea).

"Chemical liquid supply unit, substrate processing apparatus having the same, and chemical liquid supply method" was invented by Joo Sung Lee (Cheonan-si, South Korea), Kang Suk Lee (Yongin-si, South Korea) and Soon Kab Kwon (Gimhae-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "Proposed are a chemical liquid supply unit, a substrate processing apparatus having the same, and a chemical liquid supply method. More particularly, proposed is a technique for supplying chemical liquids of different flow rates, in which a chemical liquid is supplied at the sam...