ALEXANDRIA, Va., Nov. 6 -- United States Patent no. 12,463,020, issued on Nov. 4, was assigned to SEMES Co. LTD. (Cheonan-si, South Korea).
"Support unit, apparatus for treating substrate with the same" was invented by Yun Seok Bak (Seongnam-si, South Korea) and Hyung Joon Kim (Pyeongtaek-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "The inventive concept provides a substrate treating apparatus. The substrate treating apparatus includes a housing having a treating space treating a substrate; a support unit supporting the substrate at the treating space; a gas supply unit supplying a process gas into the treating space; and a plasma source generating a plasma from the process gas, and wherein...