ALEXANDRIA, Va., Nov. 6 -- United States Patent no. 12,460,863, issued on Nov. 4, was assigned to SEMES Co. LTD. (Chungcheongnam-Do, South Korea).
"Apparatus for treating a substrate" was invented by Ki-Moon Kang (Gyeonggi-do, South Korea), Hyun Goo Park (Gyeonggi-do, South Korea) and Hyo Won Yang (Seoul, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "The inventive concept provides a substrate treating apparatus. The substrate treating apparatus includes a chamber having a treating space therein; a substrate support unit configured to support a substrate in the treating space; and a fluid supply unit configured to supply a fluid in a supercritical state to the treating space, wherein the fluid su...