ALEXANDRIA, Va., Nov. 25 -- United States Patent no. 12,482,673, issued on Nov. 25, was assigned to Semes Co. Ltd. (Cheonan-si, South Korea).
"Liquid supply unit, substrate treating apparatus, and bottle replacing method" was invented by Dae Woon Lee (Cheonan-si, South Korea), Young Ju Jo (Hwaseong-si, South Korea) and Sung-Gyu Lee (Cheonan-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "Provided is an apparatus for treating a substrate, the apparatus including: a liquid treating chamber for liquid-treating a substrate by supplying a treatment liquid to the substrate; and a liquid supply unit for supplying the treatment liquid to the liquid treating chamber, in which the liquid supply unit inc...