US Patent Issued to SEMES on Nov. 25 for "Anti freeze valve apparatus and semiconductor processing device including the same and manufacturing method thereof" (South Korean Inventors)

ALEXANDRIA, Va., Nov. 25 -- United States Patent no. 12,480,595, issued on Nov. 25, was assigned to SEMES Co. LTD. (Chungcheongnam-do, South Korea).

"Anti freeze valve apparatus and semiconductor processing device including the same and manufacturing method thereof" was invented by Jin Se Park (Chungcheongnam-do, South Korea), Ki Bong Kim (Gyeonggi-do, South Korea) and Myung Seok Cha (Seoul, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "The present disclosure provides a valve apparatus that prevents defects in the valve apparatus and prevents damage to the heat insulating material due to a cryogenic liquid fluid, and a semiconductor processing device including the same and a manufacturing method...