US Patent Issued to SEMES on Nov. 18 for "Support unit and substrate treating apparatus including the same" (South Korean Inventors)

ALEXANDRIA, Va., Nov. 18 -- United States Patent no. 12,472,596, issued on Nov. 18, was assigned to SEMES Co. LTD. (Chungcheongnam-do, South Korea).

"Support unit and substrate treating apparatus including the same" was invented by Kang Sul Kim (Hwaseong-si, South Korea) and Hee Man Ahn (Seoul, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "The present invention provides a substrate treating apparatus, including: a treatment container having a treatment space therein; a support unit for supporting and rotating the substrate in the treatment space; and a liquid supply unit for supplying a liquid onto the substrate, in which wherein the support unit includes: a body on which the substrate is seated...