ALEXANDRIA, Va., Nov. 18 -- United States Patent no. 12,474,646, issued on Nov. 18, was assigned to SEMES Co. LTD. (Cheonan-si, South Korea).
"Heating unit, apparatus and facility for processing substrates with same" was invented by Jong Seok Seo (Cheonan-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "Proposed is an apparatus for processing substrates and a facility for processing substrates including a heating unit. The heating unit includes a heating plate provided in a heating space to heat a substrate while supporting the substrate; and a fixing portion configured to fix a position of the heating plate, wherein the fixing portion includes a plurality of fixing members spaced at regular in...