ALEXANDRIA, Va., Nov. 11 -- United States Patent no. 12,469,741, issued on Nov. 11, was assigned to SEMES Co. LTD. (Chungcheongnam-do, South Korea).
"Apparatus for processing substrate" was invented by Kyung Taek Im (Chungcheongnam-do, South Korea), Hwi Jae Lee (Chungcheongnam-do, South Korea) and Kyoung Don Lee (Chungcheongnam-do, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "An apparatus for processing a substrate includes a support plate including a first accommodation space having a disk shape disposed therein and supporting a substrate; a first cooling means accommodated in the first accommodation space and including a phase change material; and a second cooling means disposed in the suppor...