ALEXANDRIA, Va., June 10 -- United States Patent no. 12,291,029, issued on May 6, was assigned to SEMES Co. LTD. (Chungcheongnam-do, South Korea).
"Apparatus and method for processing substrate" was invented by Sung Ho Kim (Chungcheongnam-do, South Korea), Bo Yeon Hwang (Chungcheongnam-do, South Korea), Chang Jin Moon (Seoul, South Korea), Sol Min Park (Chungcheongnam-do, South Korea) and Sang Seok Kim (Chungcheongnam-do, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "The present disclosure provides a method for processing a substrate that can maintain a production amount even when a production model is changed. The method for processing a substrate comprises: disposing the substrate on a levitat...