US Patent Issued to SEMES on May 27 for "Substrate processing apparatus and substrate processing method" (South Korean Inventors)

ALEXANDRIA, Va., June 17 -- United States Patent no. 12,311,415, issued on May 27, was assigned to SEMES Co. LTD. (Cheonan-si, South Korea).

"Substrate processing apparatus and substrate processing method" was invented by Do Hyung Kim (Chungcheongnam-do, South Korea), Dae Hun Kim (Pyeongtaek-si, South Korea), Young Jin Kim (Cheonan-si, South Korea), Tae Ho Kang (Suwon-si, South Korea), Young Joon Han (Cheonan-si, South Korea), Eun Hyeok Choi (Cheonan-si, South Korea) and Jun Gwon Lee (Ulsan, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "Proposed are a substrate processing apparatus and a substrate processing method capable of efficiently preventing contamination of a substrate and a processing s...