US Patent Issued to SEMES on May 27 for "Apparatus for temperature measurement and method of processing substrate" (South Korean Inventors)

ALEXANDRIA, Va., June 17 -- United States Patent no. 12,317,419, issued on May 27, was assigned to SEMES Co. LTD. (Chungcheongnam-do, South Korea).

"Apparatus for temperature measurement and method of processing substrate" was invented by Yong Jun Seo (Gyeonggi-do, South Korea), Sang Hyun Son (Busan, South Korea), Su Jin Chae (Gyeonggi-do, South Korea) and Dong Ok Ahn (Gyeonggi-do, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "A temperature measuring apparatus with improved accuracy is provided. The temperature measuring apparatus comprises a test substrate having a thermal conductivity, a circuit board layer laminated on the test substrate and including a plurality of through holes exposing a t...