ALEXANDRIA, Va., June 16 -- United States Patent no. 12,306,549, issued on May 20, was assigned to SEMES Co. LTD. (Chungcheongnam-Do, South Korea).
"Photo mask stage unit and photo mask stocker including the same" was invented by Yun Ho Choi (Osan-si, South Korea) and Seung Won Kim (Yongin-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "Disclosed is a photo mask stage unit performing alignment on a photo mask, the photo mask stage unit including: an aligning member for aligning the photo mask so that the photo mask is positioned in a proper position; and guide members for supporting edges of the photo mask and guiding the photo mask to the proper position, in which the aligning member pushes t...