ALEXANDRIA, Va., June 12 -- United States Patent no. 12,300,519, issued on May 13, was assigned to SEMES Co. LTD. (Cheonan-si, South Korea).
"Surface treatment method" was invented by Jung Suk Goh (Hwaseong-si, South Korea), Sun Mi Kim (Jeollanam-do, South Korea), Ji Su Hong (Asan-si, South Korea), Kuk Saeng Kim (Goyang-si, South Korea), Cheng Bin Cui (Suwon-si, South Korea) and Pil Kyun Heo (Hwaseong-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "Disclosed is a substrate treatment apparatus. The apparatus includes a support unit that supports and rotates a substrate and a spray unit equipped with one or more nozzles to spray a dual fluid that is a mixture of a cleaning agent and carbon dioxi...