US Patent Issued to SEMES on May 13 for "Support unit, heating unit and substrate treating apparatus including the same" (South Korean Inventor)

ALEXANDRIA, Va., June 12 -- United States Patent no. 12,300,531, issued on May 13, was assigned to SEMES Co. LTD. (Chungcheongnam-Do, South Korea).

"Support unit, heating unit and substrate treating apparatus including the same" was invented by Chung Woo Lee (Suwon-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "The inventive concept provides a support unit for supporting a substrate. The support unit includes a heating unit for heating the substrate, and wherein the heating unit includes: a plurality of heating members; and a plurality of first power lines and a plurality of second power lines providing a supply and return pathway for a power to and from the plurality of heating members, and ...