US Patent Issued to SEMES on May 13 for "Chemical liquid supply unit and substrate processing apparatus including the same" (South Korean Inventors)

ALEXANDRIA, Va., June 12 -- United States Patent no. 12,300,514, issued on May 13, was assigned to SEMES Co. LTD. (Cheonan-si, South Korea).

"Chemical liquid supply unit and substrate processing apparatus including the same" was invented by Seong Soo Lee (Suwon-si, South Korea), Dong Hee Son (Hwaseong-si, South Korea) and Moon Sik Choi (Seoul, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "A chemical liquid supply unit and a substrate processing apparatus including the same are proposed, which is capable of efficiently removing contaminants in a chemical liquid."

The patent was filed on March 21, 2023, under Application No. 18/124,277.

*For further information, including images, charts and tabl...