US Patent Issued to Semes on March 25 for "Substrate test apparatus and method for measuring dechucking force using the same" (South Korean Inventors)

ALEXANDRIA, Va., March 26 -- United States Patent no. 12,261,072, issued on March 25, was assigned to Semes Co. Ltd. (Chungcheongnam-do, South Korea).

"Substrate test apparatus and method for measuring dechucking force using the same" was invented by Jong Ho Kim (Gyeonggi-do, South Korea), Doo Hee Lee (Daegu, South Korea) and Hae Yong Ryu (Gyeonggi-do, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "A substrate test apparatus is provided that can measure a dechucking force with high reliability. The substrate test apparatus includes an electrostatic chuck, a normal-force measuring unit disposed on the electrostatic chuck to be capable of pushing or pulling the substrate vertically, an electrostati...