ALEXANDRIA, Va., June 4 -- United States Patent no. 12,322,610, issued on June 3, was assigned to SEMES Co. LTD. (Cheonan-si, South Korea).
"Processing liquid supply apparatus and method of removing solids from processing liquid supply apparatus" was invented by Mu Hyeon Lee (Cheonan-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "Proposed herein are a processing liquid supply apparatus and a method of removing solids from the processing liquid supply apparatus. The proposed processing liquid supply apparatus has a flushing function for removing solids such as silica which are precipitated as a result of supplying a processing liquid from the processing liquid supply apparatus to a substrate p...