ALEXANDRIA, Va., June 4 -- United States Patent no. 12,318,819, issued on June 3, was assigned to SEMES Co. LTD. (Cheonan-si, South Korea).
"Exhaust assembly, and liquid processing apparatus and substrate processing equipment including the same" was invented by Kyung Min Kim (Daegu, South Korea), In Hwang Park (Cheonan-si, South Korea), Joo Jib Park (Asan-si, South Korea), Hyun Jin Yang (Suncheon-si, South Korea) and Ji Hyeong Lee (Cheonan-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "According to an embodiment of the present invention, there are provided an exhaust assembly capable of uniformly forming an air flow in an exhaust step of discharging a gas to the outside, and a liquid processi...