ALEXANDRIA, Va., June 25 -- United States Patent no. 12,341,030, issued on June 24, was assigned to SEMES Co. LTD. (Chungcheongnam-Do, South Korea).
"Support unit and substrate treating apparatus" was invented by Kyung Man Kim (Seongnam-si, South Korea), Jeong Woo Han (Gunpo-si, South Korea), Ji-hwan Lee (Incheon, South Korea), Wan Jae Park (Hwaseong-si, South Korea), Yoon Jong Ju (Cheonan-si, South Korea) and Seong Hak Bae (Changwon-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "The present invention provides a support unit, including: a support plate on which a substrate is placed, and which includes an electrostatic electrode providing electrostatic force to the substrate; a heater provide...