US Patent Issued to SEMES on June 24 for "Moving assembly for recovery guard and substrate processing apparatus" (South Korean Inventors)

ALEXANDRIA, Va., June 25 -- United States Patent no. 12,337,356, issued on June 24, was assigned to SEMES Co. LTD. (Chungcheongnam-do, South Korea).

"Moving assembly for recovery guard and substrate processing apparatus" was invented by Won Sik Son (Chungcheongnam-do, South Korea), Pil Kyun Heo (Chungcheongnam-do, South Korea) and Ho Jong Hwang (Chungcheongnam-do, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "The moving assembly for a recovery guard includes a recovery vessel including a first recovery vessel disposed to surround a substrate support and a second recovery vessel disposed inside of the first recovery vessel, concentrically with respect to the first recovery vessel, and a lifting d...