ALEXANDRIA, Va., June 25 -- United States Patent no. 12,341,028, issued on June 24, was assigned to SEMES Co. LTD. (Chungcheongnam-do, South Korea).
"Apparatus for processing substrate" was invented by Sun Wook Jung (Chungcheongnam-do, South Korea), Ha Neul Yoo (Chungcheongnam-do, South Korea), Woo Ram Lee (Chungcheongnam-do, South Korea) and Young Jun Son (Chungcheongnam-do, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "An apparatus for processing a substrate includes a first bowl and a processing space therein; a first support portion disposed in the processing space and configured to support the substrate in a first support position; a second bowl disposed to move in a first direction in the ...