ALEXANDRIA, Va., June 19 -- United States Patent no. 12,334,330, issued on June 17, was assigned to SEMES Co. LTD. (Chungcheongnam-Do, South Korea).
"Substrate treating apparatus" was invented by Miso Park (Daejeon, South Korea), Yong Hee Lee (Cheonan-si, South Korea), Eui Sang Lim (Cheonan-si, South Korea) and Jinwoo Jung (Seoul, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "An apparatus for treating a substrate using a treating fluid in a supercritical state is provided. In a pressure increasing step of increasing a pressure in the treating space from a pressure lower than a critical pressure of the treating fluid to a treating pressure higher than the critical pressure, the apparatus controls...