US Patent Issued to SEMES on June 17 for "Pump, chemical liquid supplying unit, and substrate treating apparatus" (South Korean Inventors)

ALEXANDRIA, Va., June 19 -- United States Patent no. 12,331,736, issued on June 17, was assigned to SEMES Co. LTD. (Cheonan-si, South Korea).

"Pump, chemical liquid supplying unit, and substrate treating apparatus" was invented by Young Jun Son (Cheonan-si, South Korea), Byoung Doo Choi (Cheonan-si, South Korea), Sung Chul Jung (Cheonan-si, South Korea), Woo Sin Jung (Cheonan-si, South Korea), Young Un Yun (Asan-si, South Korea), Woo Ram Lee (Seoul, South Korea) and Ki Sang Eum (Cheonan-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "Provided is a pump for supplying a liquid. The pump includes: a tube including a pump chamber communicating with a chemical liquid inlet and a chemical liquid out...