US Patent Issued to SEMES on June 17 for "Apparatus for smoothly exhausting the atmosphere in a processing space when rotating a substrate with liquid" (South Korean Inventors)

ALEXANDRIA, Va., June 19 -- United States Patent no. 12,331,399, issued on June 17, was assigned to SEMES Co. LTD. (Chungcheongnam-Do, South Korea).

"Apparatus for smoothly exhausting the atmosphere in a processing space when rotating a substrate with liquid" was invented by Ju Won Kim (Chungcheongnam-do, South Korea), Yang Yeol Ryu (Chungcheongnam-do, South Korea), Hee Man Ahn (Seoul, South Korea), Jun Ho Seo (Seoul, South Korea), Dong Woon Park (Seoul, South Korea) and Sang Pil Yoon (Seoul, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "An apparatus for processing a substrate includes a first processing unit configured to have a first processing container having a first inner space and a first ...