ALEXANDRIA, Va., June 19 -- United States Patent no. 12,334,386, issued on June 17, was assigned to SEMES Co. LTD. (Chungcheongnam-do, South Korea).
"Apparatus and method for treating substrate" was invented by Kiwon Han (Gyeonggi-do, South Korea), Tae Kyung Kong (Chungcheongnam-do, South Korea) and Jin Sung Sun (Chungcheongnam-do, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "An apparatus for treating a substrate includes a transfer part, a first transfer robot and a second transfer robot disposed in a longitudinal direction of the transfer part, a liquid treating part disposed at one side of the transfer part to apply a liquid onto the substrate by supplying the liquid to the substrate, and a ...