US Patent Issued to SEMES on July 22 for "Pump, apparatus for supplying chemical liquid and apparatus for processing substrate" (South Korean Inventors)

ALEXANDRIA, Va., July 23 -- United States Patent no. 12,366,239, issued on July 22, was assigned to SEMES Co. LTD. (Chungcheongnam-do, South Korea).

"Pump, apparatus for supplying chemical liquid and apparatus for processing substrate" was invented by Young Jun Son (Chungcheongnam-do, South Korea), Woo Sin Jung (Chungcheongnam-do, South Korea), Woo Ram Lee (Chungcheongnam-do, South Korea), Byoung Doo Choi (Chungcheongnam-do, South Korea) and Sung Chul Jung (Chungcheongnam-do, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "Provided are a pump, an apparatus for supplying a chemical liquid and an apparatus for processing a substrate. The pump includes a tube having elasticity and having a flow path ...