US Patent Issued to SEMES on July 15 for "Apparatus for treating substrate and assembly for distributing gas" (South Korean Inventor)

ALEXANDRIA, Va., July 16 -- United States Patent no. 12,362,148, issued on July 15, was assigned to SEMES Co. LTD. (Chungcheongnam-Do, South Korea).

"Apparatus for treating substrate and assembly for distributing gas" was invented by Hyoung Kyu Son (Seoul, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "A gas distribution assembly provided in an apparatus for treating a substrate with plasma to distribute gas includes a gas distribution plate formed with a plurality of gas introduction holes for diffusing gas supplied from the gas supply unit; a shower head plate disposed at the upper portion or lower portion of the gas distribution plate to be in contact with the gas distribution plate and having...