US Patent Issued to Semes on Jan. 27 for "Unit for supplying liquid, apparatus and method for treating substrate with the unit" (South Korean Inventors)

ALEXANDRIA, Va., Jan. 28 -- United States Patent no. 12,533,714, issued on Jan. 27, was assigned to Semes Co. Ltd. (Chungcheongnam-do, South Korea).

"Unit for supplying liquid, apparatus and method for treating substrate with the unit" was invented by Gi Hun Choi (Changwon-si, South Korea) and Young Joon Han (Cheonan-si, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "The substrate treating apparatus includes a liquid supply unit for supplying a treating liquid to a substrate supported by a support unit, the liquid supply unit includes a nozzle member for discharging the treating liquid; and a driving member for moving the nozzle member to a standby position and a process position, the nozzle memb...