ALEXANDRIA, Va., Jan. 13 -- United States Patent no. 12,525,470, issued on Jan. 13, was assigned to SEMES Co. LTD. (Cheonan-si, South Korea).
"Nozzle and substrate processing apparatus including the same" was invented by Jae Youl Kim (Yongin-si, South Korea), Cheol Yong Shin (Yongin-si, South Korea) and Jin Woo Jang (Seoul, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "According to an embodiment of the present disclosure, a processing liquid supply nozzle includes a nozzle body, a nozzle tip member connected to a lower portion of the nozzle body, and a fastening member that is disposed between the nozzle body and the nozzle tip member to connect the nozzle body and the nozzle tip member to each ...