ALEXANDRIA, Va., Jan. 13 -- United States Patent no. 12,525,474, issued on Jan. 13, was assigned to Semes Co. LTD. (Chungcheongnam-do, South Korea).
"Apparatus for treating substrate and method for treating substrate" was invented by Jee Young Lee (Suwon-si, South Korea), Young Dae Chung (Incheon, South Korea), Ji Hoon Jeong (Hwaseong-si, South Korea), Won-Geun Kim (Goyang-si, South Korea) and Tae Shin Kim (Suwon-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "The inventive concept provides a substrate treating apparatus. The substrate treating apparatus includes a support unit horizontally maintaining a substrate; a laser irradiation unit for irradiating the substrate with a laser; a photo-de...