ALEXANDRIA, Va., Feb. 3 -- United States Patent no. 12,542,262, issued on Feb. 3, was assigned to Semes Co. Ltd. (Chungcheongnam-do, South Korea).
"Apparatus for treating substrate and method for treating substrate" was invented by Dong-Hun Kim (Seoul, South Korea), Jun Taek Koo (Seoul, South Korea), Myoung Sub Noh (Hwaseong-si, South Korea) and Dong Sub Oh (Busan, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "The inventive concept provides a substrate treating apparatus. The substrate treating apparatus includes a housing having an inner space; a plate separating the inner space into a first space which is above and a second space which is below and having a plurality of through holes; a first ...