ALEXANDRIA, Va., Feb. 26 -- United States Patent no. 12,234,555, issued on Feb. 25, was assigned to SEMES Co. LTD. (Chungcheongnam-do, South Korea).
"Substrate treating apparatus and filler member provided therein" was invented by Jin Mo Jae (Asan-si, South Korea), Seung Hoon Oh (Cheonan-si, South Korea), Young Seop Choi (Cheonan-si, South Korea), Mi So Park (Daejeon, South Korea) and Jong Hyeon Woo (Asan-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "An apparatus for treating a substrate includes a vessel having a sealable process space formed therein in which the substrate is accommodated, a supply port that is provided inside a wall of the vessel and that supplies a process fluid into the ...