ALEXANDRIA, Va., Feb. 19 -- United States Patent no. 12,230,510, issued on Feb. 18, was assigned to SEMES Co. LTD. (Cheonan-si, South Korea).
"Substrate treating apparatus and method for the same" was invented by Byoung Doo Choi (Chungcheongnam-do, South Korea) and Jin Ho Choi (Incheon, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "A substrate treating apparatus is disclosed. The substrate treating apparatus includes a treating container having a treatment space to treat a substrate, a standby port positioned at one side of the treating container to allow a nozzle, which discharges a treatment liquid, to stand by, and a liquid supplying unit moving between the treating container and the standby ...