ALEXANDRIA, Va., Feb. 11 -- United States Patent no. 12,546,534, issued on Feb. 10, was assigned to SEMES Co. LTD. (Chungcheongnam-do, South Korea).
"Substrate treating apparatus" was invented by Seung Hoon Oh (Chungcheongnam-do, South Korea), Ji Hyeong Lee (Chungcheongnam-do, South Korea), Jin Se Park (Chungcheongnam-do, South Korea), Yong Joon Im (Gyeonggi-do, South Korea), Young Hun Lee (Chungcheongnam-do, South Korea) and Yong Sun Ko (Gyeonggi-do, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "A substrate treating apparatus of the present disclosure comprises: a chamber member having an accommodation space configured to accommodate a vessel part where a substrate treatment region constituting...