ALEXANDRIA, Va., Feb. 11 -- United States Patent no. 12,544,803, issued on Feb. 10, was assigned to SEMES Co. LTD. (Cheonan-si, South Korea).
"Substrate processing apparatus" was invented by Seungeun Na (Bucheon-si, South Korea), Kyungmin Kim (Cheonan-si, South Korea), Sinae Song (Hwaseong-si, South Korea), Hojin Jeong (Cheonan-si, South Korea) and Jungeun Park (Seongnam-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "The technical scope of the present disclosure provides a substrate processing apparatus including a first supply unit and a second supply unit each configured to spray a fluid onto a substrate seated on a substrate support unit, wherein the first supply unit includes a first supp...