US Patent Issued to SEMES on Feb. 10 for "Bowl for processing a substrate and processing substrate device including the same" (South Korean Inventors)

ALEXANDRIA, Va., Feb. 11 -- United States Patent no. 12,544,804, issued on Feb. 10, was assigned to SEMES Co. LTD. (Chungcheongnam-do, South Korea).

"Bowl for processing a substrate and processing substrate device including the same" was invented by Sun Wook Jung (Gyeonggi-do, South Korea), Hyun Yoon (Seoul, South Korea), Ha Neul Yoo (Gyeonggi-do, South Korea) and Ho Jong Hwang (Gyeonggi-do, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "According to the present disclosure, provided is a bowl receiving incident droplets and preventing the same from scattering, or causing the same to scatter downwardly, the bowl including: a main body surrounding a substrate support unit; a groove formed in a spir...