ALEXANDRIA, Va., Dec. 9 -- United States Patent no. 12,493,279, issued on Dec. 9, was assigned to SEMES Co. LTD. (Chungcheongnam-Do, South Korea).
"Management device for substrate processing system and management method for substrate processing system" was invented by Man Gyu Lee (Daegu, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "A management device for a substrate processing system and a management method for the substrate processing system are provided to allow an operation work in charge of an overhead hoist transport (OHT) control system to know an inspection work end state using an inspection work state, when an inspector performs inspection work of a manufacturing facility using an OHT....