US Patent Issued to SEMES on Dec. 9 for "Chemical liquid providing unit and substrate treating apparatus including the same" (South Korean Inventors)

ALEXANDRIA, Va., Dec. 9 -- United States Patent no. 12,491,547, issued on Dec. 9, was assigned to SEMES Co. LTD. (Cheonan-Si, South Korea).

"Chemical liquid providing unit and substrate treating apparatus including the same" was invented by Gun Min Lee (Chungcheongnam-do, South Korea), Do Gyeong Ha (Daegu, South Korea), Moon Soon Choi (Chungcheongnam-do, South Korea), Chae Young Lim (Chungcheongnam-do, South Korea) and Jae Hyeok Yu (Gyeonggi-do, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "Provided are a treating liquid providing unit capable of predicting a temperature change of a substrate treating liquid by adding an inflow amount or consumption amount of the substrate treating liquid as a c...