ALEXANDRIA, Va., Dec. 9 -- United States Patent no. 12,491,532, issued on Dec. 9, was assigned to SEMES Co. LTD. (Chungcheongnam-Do, South Korea).
"Apparatus and method for treating substrate" was invented by Jun Young Choi (Cheonan-si, South Korea), Gui Su Park (Cheonan-si, South Korea), Young Jin Jang (Cheonan-si, South Korea), Eun Jung Lee (Cheonan-si, South Korea) and Jun Hyun Lim (Cheonan-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "The inventive concept provides a substrate treating apparatus. The substrate treating apparatus includes a liquid treating chamber; a support configured to support a substrate within the liquid treating chamber; a first treating liquid supply unit configure...