ALEXANDRIA, Va., Dec. 31 -- United States Patent no. 12,512,301, issued on Dec. 30, was assigned to SEMES Co. LTD. (Cheonan-si, South Korea).
"Substrate treating apparatus and substrate support unit" was invented by Je Ho Kim (Hwaseong-si, South Korea), Jae Hwan Cho (Suwon-si, South Korea) and Taesuk Jung (Suwon-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "The inventive concept provides a substrate treating apparatus. The substrate treating apparatus includes a process chamber configured to form a treatment space, a gas supply unit configured to supply a process gas into an interior of the process chamber, a plasma generating unit configured to generate plasma from the process gas introduce...