US Patent Issued to SEMES on Dec. 30 for "Moving assembly for recovery guard and substrate processing apparatus" (South Korean Inventors)

ALEXANDRIA, Va., Dec. 31 -- United States Patent no. 12,508,633, issued on Dec. 30, was assigned to SEMES Co. LTD. (Chungcheongnam-do, South Korea).

"Moving assembly for recovery guard and substrate processing apparatus" was invented by Won Sik Son (Chungcheongnam-do, South Korea), Sae Hoon Han (Chungcheongnam-do, South Korea), In Ki Jung (Chungcheongnam-do, South Korea), Se Hoon Oh (Chungcheongnam-do, South Korea) and Hyeon Jun Lee (Chungcheongnam-do, South Korea).

According to the abstract* released by the U.S. Patent & Trademark Office: "The moving assembly for a recovery guard includes a recovery vessel, including a first recovery vessel surrounding a substrate support, a second recovery vessel, and a lifting driver connected to the f...