ALEXANDRIA, Va., Dec. 31 -- United States Patent no. 12,512,306, issued on Dec. 30, was assigned to SEMES Co. LTD. (Chungcheongnam-do, South Korea).
"Lift pin assembly and substrate treating apparatus" was invented by Wan Hee Jeong (Gyeonggi-do, South Korea), Kuk Saeng Kim (Gyeonggi-do, South Korea) and Jun Hyeak Choi (Seoul, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "Disclosed is a lift pin assembly, including: a lift pin inserted into a pin hole; a moving plate moving up and down by a driving unit; a bellows module including a lower flange supported by the moving plate and a bellows shaft supporting the lift pins; and a pressurizing member provided between the lower flange and the moving pl...