ALEXANDRIA, Va., Dec. 23 -- United States Patent no. 12,506,018, issued on Dec. 23, was assigned to SEMES Co. LTD. (Chungcheongnam-do, South Korea).
"Apparatus and method for treating substrate" was invented by Eui Sang Lim (Cheonan-si, South Korea), Young Hun Lee (Cheonan-si, South Korea), Jinwoo Jung (Seoul, South Korea), Miso Park (Daejeon, South Korea), Byongwook Ahn (Seoul, South Korea) and Yong Hee Lee (Cheonan-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "The apparatus includes a support unit to support the substrate in a treatment space of a process chamber, a first fluid supply unit to supply a supercritical fluid having an organic solvent dissolved in the supercritical fluid, to th...