ALEXANDRIA, Va., Dec. 16 -- United States Patent no. 12,496,626, issued on Dec. 16, was assigned to SEMES Co. LTD. (Chungcheongnam-do, South Korea).
"Substrate treating apparatus" was invented by Young Seo An (Gyeonggi-do, South Korea), Jae Hoon Park (Gyeonggi-do, South Korea), Young Ju Jo (Gyeonggi-do, South Korea), Kyung Jin Seo (Chungcheongnam-do, South Korea), Seo Jung Park (Gyeonggi-do, South Korea), Dae Myeong Lee (Busan, South Korea), Jae Hyun Lim (Chungcheongnam-do, South Korea) and Nam Kyu Kim (Chungcheongnam-do, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "A substrate treating apparatus includes: a spin chuck supporting a substrate; a rinse liquid supply unit supplying a rinse liquid;...