ALEXANDRIA, Va., Dec. 16 -- United States Patent no. 12,498,174, issued on Dec. 16, was assigned to Semes Co. LTD. (Chungcheongnam-do, South Korea).
"Substrate processing apparatus" was invented by Juyeon Cho (Suwon-si, South Korea), Youngjun Lee (Cheonan-si, South Korea), Kwangsoo Kim (Cheonan-si, South Korea), Kisang Eum (Cheonan-si, South Korea), Wooram Lee (Seoul, South Korea), Jongwha Kang (Cheonan-si, South Korea), Younghun Jung (Cheonan-si, South Korea), Junghyun Lee (Cheonan-si, South Korea), Dongwoon Park (Seoul, South Korea) and Sunwook Jung (Hwaseong-si, South Korea).
According to the abstract* released by the U.S. Patent & Trademark Office: "A substrate processing apparatus includes a bake chamber, a chamber door that opens an...